Microscope

Confocal Laser Scanning Microscopy

  • 紫外線レーザのフォーカスから表面形状を測定
  • 100nm程度の観測が可能

Atomic Force Microscope

Scanning Electron Microscope

  • 高解像度だが操作性に難あり
  • 測定中は真空に引く必要あり

Scanning White Light Interferometer

  • 干渉縞の変化から表面形状を測定
  • 反射率が高い試料でないと測定が難しい
  • 面の曲率が大きいと干渉縞の設定が難しい

Contact Profilometer

  • 触診で表面形状を測定
  • 高精度だが試料に接触する必要あり

Optical Microscope

  • 普通の顕微鏡

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  • Last modified: 2023/03/10 08:03
  • by Daiphys